KYOCERA Develops Silicon MEMS Resonator Production Technology

Kyocera Corporation (President: Hideo Tanimoto) announced that it has successfully developed a proprietary technology to produce silicon MEMS resonators for the silicon MEMS market. Following Kyocera’s July 2019 acquisition of 100% of the shares of Tikitin Oy, a Finnish venture company possessing advanced MEMS technology, and the subsequent establishment of Kyocera Tikitin Oy, the company has achieved outstanding frequency temperature coefficient and ESR characteristics^*1 never previously attained with conventional quartz and silicon products.

Timing devices that generate stable frequencies at regular intervals are essential for the control and operation of electronic circuits. Driven in part by widespread adoption of IoT and wearable devices, as well as the acceleration of ADAS and EV technologies, the timing device market is expected to expand to 4.5 billion U.S. dollars by around 2030. Because demand is rising rapidly for timing devices that are smaller, lower-profile, higher-frequency, and superior with regard to temperature resistance, silicon MEMS resonators that meet these requirements will become widely used.

Kyocera will begin mass producing high-value-added silicon MEMS resonators in 2021, and will continue its technological development to address demand for further miniaturization, lower profile, and higher frequency, thereby advancing the field of high-added-value timing devices.